ZnO Nanowire-Based Oxygen Gas Sensor

Chien Yuan Lu, Sheng Po Chang, Shoou Jinn Chang, Ting Jen Hsueh, Cheng Liang Hsu, Yu Zung Chiou, I. Cherng Chen

研究成果: Article同行評審

62 引文 斯高帕斯(Scopus)

摘要

We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small x-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.

原文English
頁(從 - 到)485-489
頁數5
期刊IEEE Sensors Journal
9
發行號4
DOIs
出版狀態Published - 2009 4月

All Science Journal Classification (ASJC) codes

  • 儀器
  • 電氣與電子工程

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