ZrAl3 Intermetallic Compound Thin Film as a Diffusion Barrier between Al and Au Layers

Jin Kuo Ho Ho, Kwang Lung Lin Lin

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

指紋 深入研究「ZrAl<sub>3</sub> Intermetallic Compound Thin Film as a Diffusion Barrier between Al and Au Layers」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy