摘要
none| 獎項日期 | 2020 |
|---|---|
| 原文 | English |
| 監督員 | Fei-Yi Hung (Supervisor) |
Applications of Al substrate for chamber of semiconductor:characteristics of interface and behavior of particle erosion of Y2O3 YOF and Al-Ta alloy thermal plasma sprayed layers
學生論文: Doctoral Thesis