Particle-in-Cell Simulation of Capacitively Coupled Plasma in The Presence of Coulomb Collisions and Secondary Electron Emission

摘要

A Particle-in-Cell method is built in one-dimensional electrostatic model to study effects of secondary electron emission (SEE) in capacitively coupled plasma (CCP) The model simulate the particles’ behavior in one-dimensional space bounded by two walls The generation of “plasma sheath” is observed Furthermore secondary electron emission is incorporated which is produced by electrons’ bombardment The formation of plasma sheath is closely related to the behavior of secondary electrons To deal the SEE effect more realistically the particles’ Coulomb collision effect is included into the simulation We also employ radio-frequency (RF) electric field into the system as in CCP widely used in industrial processes By following particles’ trajectories and energy development effects of RF bias (which can then give rise to resonance between the bounce motion of particles) is examined

獎項日期	2015 2月 13
原文	English
監督員	Yasutaro Nishimura (Supervisor)